HVAC/Utilities

Utility Facilities Construction

DI System, CDA System, PCW System, Gas supply System
Drainage System, Acid Exhaust System, Heat/Organic Exhaust System, Provide Professional Service and Construction for Monitoring System

DI (Deionized Water) system, which is a facility for various utilities necessary for the production process in high-tech industries, is mainly consist of RO reverse osmosis purification equipment, micro filter, activated carbon filter, UV Sterilizer, MBD (Mixed bed deionizer), MBP (Mixed bed polisher), and it is a system that supplies extremely purified ultrapure water in large quantities in ultra-precision industries such as semiconductors.

CDA (Compressed Dry Air) system supplies optimal compressed air by removing pollutants such as dust, oil and moisture contained in compressed air to the required degree. PCW (Power Supply Cooling Water) system is a cooling water system to prevent fires or breakdowns caused by high temperature heaters or heat generation in equipment used in semiconductor processing.

The Vacuum system is a line for supplying the vacuum conditions necessary for the production process and production equipment. The gas supply system consists of GN2 and PN2, and the wastewater generated in the clean room is naturally drained by installing an acid container.

The acid gas (toxic) that leaks out of the equipment is washed several times with sodium hydroxide and water after passing through the duct through the duct and then discharged to the atmosphere.

Organic gases and heat exhaust are discharged to the atmosphere through ducts after passing through an organic filter. Gas room facilities and utility systems are monitored in real time for efficient system management, and solutions are provided for comprehensive utility facilities.

Applications

DI system

CDA system

PCW system

Mountain exhaust system

Vacuum system